I-WF6 isetyenziswa ikakhulu njengento ekrwada yenkqubo yokubeka umphunga wekhemikhali (CVD) ye-metal tungsten kushishino lombane. I-WSi2 eyenziwe kwi-WF6 ingasetyenziselwa njengento yocingo kwiisekethe ezinkulu ezidibeneyo (LSI), kwaye ingasetyenziselwa njengento ekrwada ye-semiconductor electrode, i-fluorine I-Raw materials for chemical agents, i-polymerization catalysts, izinto ezibonakalayo, njl.